A planographic printing process using plates made from a photographic image WordNet 3.0 & Open English WordNet

In integrated circuit manufacturing, photolithography or optical lithography is a general term used for techniques that use light to produce minutely patterned thin films of suitable materials over a substrate, such as a silicon wafer, to protect selected areas of it during subsequent etching, deposition, or implantation operations. Wikipedia

Process used in microfabrication Wikidata

A lithographic procedure in which printing plates are made using a photographic process. Wiktionary