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bn:01173733n
Noun Concept
Categories: Lithography (microfabrication)
EN
maskless lithography
EN
Maskless lithography is a photomask-less photolithography-like technology used to project or focal-spot write the image pattern onto a chemical resist-coated substrate by means of UV radiation or electron beam. Wikipedia
Definitions
Sources
EN
Maskless lithography is a photomask-less photolithography-like technology used to project or focal-spot write the image pattern onto a chemical resist-coated substrate by means of UV radiation or electron beam. Wikipedia
Wikipedia
EN
maskless lithography
Wikidata
EN
Maskless lithography

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