Login Preferences
About News Publications Statistics Downloads API Guide License How to use Preferences
bn:03164405n
Noun Concept
SYL
No term available
EN
Plasma etching is a form of plasma processing used to fabricate integrated circuits. Wikipedia
Relations
Sources
IS A
EN
plasma processing
HAS KIND
EN
plasma ashing
USES
EN
plasma

Please note that, in order to improve your browsing experience on this website, BabelNet® uses various types of cookies, including: browsing functionality, performance and statistical cookies.

By continuing to browse the site you are agreeing to our use of cookies. OK

License